Ye et al., 2005 - Google Patents
Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguidesYe et al., 2005
View PDF- Document ID
- 13377057644323965186
- Author
- Ye W
- Xu D
- Janz S
- Cheben P
- Picard M
- Lamontagne B
- Tarr N
- Publication year
- Publication venue
- Journal of Lightwave Technology
External Links
Snippet
We demonstrate that stress engineering is an effective tool to modify or eliminate polarization dispersion in silicon-on-insulator (SOI) waveguide devices, for a wide range of waveguide cross-section shapes and dimensions. The stress-induced effects on the modal …
- 239000012212 insulator 0 title abstract description 9
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
- G02B6/1221—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/121—Channel; buried or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/105—Light guides of the optical waveguide type having optical polarisation effects
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/02—Optical fibre with cladding with or without a coating
- G02B6/02057—Optical fibre with cladding with or without a coating comprising gratings
- G02B6/02066—Gratings having a surface relief structure, e.g. repetitive variation in diameter of core or cladding
-
- G—PHYSICS
- G02—OPTICS
- G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Ye et al. | Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides | |
Daldosso et al. | Comparison among various Si/sub 3/N/sub 4/waveguide geometries grown within a CMOS fabrication pilot line | |
EP1512995B1 (en) | Photonic crystal waveguide | |
US6850670B2 (en) | Method and apparatus for controlling waveguide birefringence by selection of a waveguide core width for a top clad | |
US7194177B2 (en) | Stress-induced control of polarization dependent properties in photonic devices | |
JP4221364B2 (en) | Thermal compensation of waveguides with a dual material core. | |
Ou | Different index contrast silica-on-silicon waveguides by PECVD | |
Brooks et al. | Passive silicon-on-insulator polarization-rotating waveguides | |
EP1182474B1 (en) | Optical waveguide and fabricating method thereof, and optical waveguide circuit | |
EP1354230B1 (en) | Integrated optical device | |
US7609917B2 (en) | Method and apparatus for controlling waveguide birefringence by selection of a waveguide core width for a top cladding | |
Alayo et al. | Fabrication of PECVD-silicon oxynitride-based optical waveguides | |
Winnie et al. | Stress-induced birefringence in silicon-on-insulator (SOI) waveguides | |
Janz | Silicon-based waveguide technology for wavelength division multiplexing | |
Schriemer et al. | Modal birefringence and power density distribution in strained buried-core square waveguides | |
Huang et al. | Analytical solutions to estimate the stress induced polarization shift and the temperature sensitivity of optical waveguides | |
Hossain et al. | Stress-induced birefringence characteristics of polymer optical rib waveguides | |
Rahman et al. | Birefringence compensation of silica waveguides | |
Picardb et al. | Stress-induced birefringence in silicon-on-insulator (SOI) waveguides | |
US20060133719A1 (en) | Extracting phase error in waveguides | |
Warshavsky et al. | Accurate Modeling of Directional Couplers with Oxide Cladding: Bridging Simulation and Experiment | |
Klunder et al. | A normalized approach for designing cylindrical microresonators | |
Xu et al. | Design of polarization-insensitive components using geometrical and stress-induced birefringence in SOI waveguides | |
Sosa Andrade | Design of a silicon photonic multimode interference coupler | |
Ye | Stress engineering for polarization control in Silicon-On-Insulator waveguides and its applications in novel passive polarization splitters/filters |