Guliyev et al., 2012 - Google Patents
Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators for high-speed non-contact atomic force microscopyGuliyev et al., 2012
- Document ID
- 1310248143350592515
- Author
- Guliyev E
- Volland B
- Sarov Y
- Ivanov T
- Klukowski M
- Manske E
- Rangelow I
- Publication year
- Publication venue
- Measurement Science and Technology
External Links
Snippet
High-speed atomic force microscopy (AFM) is actually a functional tool for the studies of dynamical phenomena of biological and chemical objects on a sub-second timescale. In order to increase the imaging speed, all dynamic components of AFM have to be optimized …
- 238000004628 non contact atomic force microscopy 0 title description 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/32—AC mode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Guliyev et al. | Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators for high-speed non-contact atomic force microscopy | |
| Yong et al. | Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues | |
| Schitter et al. | Design and input-shaping control of a novel scanner for high-speed atomic force microscopy | |
| Yong et al. | A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner | |
| Wadikhaye et al. | A serial-kinematic nanopositioner for high-speed atomic force microscopy | |
| Dai et al. | High-speed metrological large range AFM | |
| KR20120089373A (en) | Active damping of high speed scanning probe microscope components | |
| Acosta et al. | A tuning fork based wide range mechanical characterization tool with nanorobotic manipulators inside a scanning electron microscope | |
| Hosseini et al. | A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy | |
| Lee et al. | Compliance and control characteristics of an additive manufactured-flexure stage | |
| Wei et al. | Design and experimental evaluation of a compliant mechanism-based stepping-motion actuator with multi-mode | |
| Yong et al. | High speed single-and dual-stage vertical positioners | |
| Wang et al. | Low-voltage and high-performance buzzer-scanner based streamlined atomic force microscope system | |
| Bertke et al. | Contact resonance spectroscopy for on-the-machine manufactory monitoring | |
| Payton et al. | Modelling oscillatory flexure modes of an atomic force microscope cantilever in contact mode whilst imaging at high speed | |
| Ito et al. | Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection | |
| Thiesler et al. | True 3D-AFM sensor for nanometrology | |
| Guliyev et al. | High speed quasi-monolithic silicon/piezostack SPM scanning stage | |
| Fantner et al. | DMCMN: In depth characterization and control of AFM cantilevers with integrated sensing and actuation | |
| Sun et al. | Analysis and variable step control of a bidirectional complementary-type inchworm actuator | |
| Acosta et al. | Gentle and fast atomic force microscopy with a piezoelectric scanning probe for nanorobotics applications | |
| Jeong et al. | Complex nonlinear dynamics in the limit of weak coupling of a system of microcantilevers connected by a geometrically nonlinear tunable nanomembrane | |
| Gao et al. | In-situ nondestructive characterization of the normal spring constant of AFM cantilevers | |
| Goj et al. | Semi-contact measurements of three-dimensional surfaces utilizing a resonant uniaxial microprobe | |
| Zhao et al. | A compact, friction self-matching, non-inertial piezo motor with scanning capability |