Wyant, 1979 - Google Patents
Precision optical testingWyant, 1979
View PDF- Document ID
- 13153373194584630544
- Author
- Wyant J
- Publication year
- Publication venue
- Science
External Links
Snippet
Increased performance requirements for modern optical systems have necessitated the development of more precise optical testing techniques. The need for accurate and rapid measurements is being met by the use of laser interferometers, microprocessors to gather …
- 230000003287 optical 0 title abstract description 29
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical means
- G01B11/24—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Instruments as specified in the subgroups and characterised by the use of optical measuring means
- G01B9/02—Interferometers for determining dimensional properties of, or relations between, measurement objects
- G01B9/02001—Interferometers for determining dimensional properties of, or relations between, measurement objects characterised by manipulating or generating specific radiation properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing of optical properties of lenses
- G01M11/0242—Testing of optical properties of lenses by measuring geometrical properties or aberrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical means
- G01B11/30—Measuring arrangements characterised by the use of optical means for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
- G01M17/00—Testing of vehicles
- G01M17/007—Testing of vehicles of wheeled or endless-tracked vehicles
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Rastogi | Techniques of displacement and deformation measurements in speckle metrology | |
Ennos | IV speckle interferometry | |
Georges et al. | Digital holographic interferometry with CO 2 lasers and diffuse illumination applied to large space reflector metrology | |
US4387994A (en) | Optical system for surface topography measurement | |
WO2013134966A1 (en) | Wavelength scanning interferometer for aspheric measurements and application method therefor | |
US4854708A (en) | Optical examination apparatus particularly useful as a Fizeau interferometer and schlieren device | |
KR20210048528A (en) | Surface shape measurement device and surface shape measurement method | |
TW202311715A (en) | Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured | |
Polack et al. | Surface shape determination with a stitching Michelson interferometer and accuracy evaluation | |
Chen et al. | Three-dimensional surface profile measurement of a cylindrical surface using a multi-beam angle sensor | |
Wyant | Precision optical testing | |
Dhanotia et al. | Improved accuracy in slope measurement and defect detection using Fourier fringe analysis | |
Cornejo-Rodriguez et al. | Wavefront slope measurements in optical testing | |
US7042578B2 (en) | Method and apparatus for absolute figure metrology | |
US7626708B2 (en) | Phase shifting grating-slit test for optical surface reconstruction | |
CN117419658A (en) | Device and method for detecting complex surface morphology of curved microlens array | |
CN116625269A (en) | Absolute detection method for plane surface shape of large-caliber optical element | |
Susini et al. | Optical metrology facility at the ESRF | |
Rochester et al. | Towards super-resolution interference microscopy metrology of x-ray variable-line-spacing diffraction gratings: Recent developments | |
JP2831428B2 (en) | Aspherical shape measuring machine | |
Centers et al. | New operational mode of the pencil beam interferometry based LTP | |
JP3599921B2 (en) | Method and apparatus for measuring refractive index distribution | |
Angel et al. | Multiple-aperture speckle method applied to local displacement measurements | |
CN118293787B (en) | Spherical dynamic interferometer based on four-wave common-path interference and detection method thereof | |
Scholz et al. | Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer |