Choi et al., 2018 - Google Patents
Vertical leakage mechanism in GaN on Si high electron mobility transistor buffer layersChoi et al., 2018
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- 12934240417194313525
- Author
- Choi F
- Griffiths J
- Ren C
- Lee K
- Zaidi Z
- Houston P
- Guiney I
- Humphreys C
- Oliver R
- Wallis D
- Publication year
- Publication venue
- Journal of Applied Physics
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Snippet
Control of leakage currents in the buffer layers of GaN based transistors on Si substrates is vital for the demonstration of high performance devices. Here, we show that the growth conditions during the metal organic chemical vapour deposition growth of the graded AlGaN …
- 229910002601 GaN 0 title abstract description 26
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