[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Lin et al., 2022 - Google Patents

Hotspot Detection with Machine Learning Based on Pixel‐Based Feature Extraction

Lin et al., 2022

View PDF @Full View
Document ID
12800893052827263916
Author
Lin Z
Gu Z
Huang Z
Bai X
Luo L
Lin G
Publication year
Publication venue
Scientific Programming

External Links

Snippet

The complexity of physical verification increases rapidly with fast shrinking technology nodes. Considering only design rule checking (DRC) constraints or lithography models cannot capture the side physical effects in the fabrication process well. Thus, it is desirable …
Continue reading at onlinelibrary.wiley.com (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/50—Computer-aided design
    • G06F17/5068—Physical circuit design, e.g. layout for integrated circuits or printed circuit boards
    • G06F17/5081—Layout analysis, e.g. layout verification, design rule check
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/50—Computer-aided design
    • G06F17/5009—Computer-aided design using simulation
    • G06F17/5036—Computer-aided design using simulation for analog modelling, e.g. for circuits, spice programme, direct methods, relaxation methods
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/30—Information retrieval; Database structures therefor; File system structures therefor
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F2217/00—Indexing scheme relating to computer aided design [CAD]
    • G06F2217/12—Design for manufacturability
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06K—RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K9/00—Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
    • G06K9/62—Methods or arrangements for recognition using electronic means
    • G06K9/6267—Classification techniques
    • G06K9/6268—Classification techniques relating to the classification paradigm, e.g. parametric or non-parametric approaches
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06K—RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K9/00—Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
    • G06K9/36—Image preprocessing, i.e. processing the image information without deciding about the identity of the image
    • G06K9/46—Extraction of features or characteristics of the image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F2217/00—Indexing scheme relating to computer aided design [CAD]
    • G06F2217/78—Power analysis and optimization
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06N—COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N99/00—Subject matter not provided for in other groups of this subclass
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/14—Originals characterised by structural details, e.g. supports, cover layers, pellicle rings
    • G03F1/144—Auxiliary patterns; Corrected patterns, e.g. proximity correction, grey level masks

Similar Documents

Publication Publication Date Title
US10216890B2 (en) Integrated circuits having in-situ constraints
Ding et al. High performance lithography hotspot detection with successively refined pattern identifications and machine learning
US7937678B2 (en) System and method for integrated circuit planar netlist interpretation
Ding et al. High performance lithographic hotspot detection using hierarchically refined machine learning
Ding et al. Machine learning based lithographic hotspot detection with critical-feature extraction and classification
US8176445B1 (en) Method and system for optimizing integrated circuit layout
US8504949B2 (en) Hybrid hotspot detection
US11562118B2 (en) Hard-to-fix (HTF) design rule check (DRC) violations prediction
US11113445B2 (en) Hotspot detection based on litho-aware machine learning
CN109242108A (en) It is detected using the lithographic hotspots of more machine learning cores
Wuu et al. Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching
Tam et al. LASIC: Layout analysis for systematic IC-defect identification using clustering
Madkour et al. Hotspot detection using machine learning
Tam et al. Systematic defect identification through layout snippet clustering
Sun et al. Efficient hotspot detection via graph neural network
US9378327B2 (en) Canonical forms of layout patterns
Wuu et al. Detecting context sensitive hot spots in standard cell libraries
US20240037313A1 (en) Statistical graph circuit component probability model for an integrated circuit design
Mostafa et al. Multi-selection method for physical design verification applications
Lin et al. Hotspot Detection with Machine Learning Based on Pixel‐Based Feature Extraction
US9626474B2 (en) Expanded canonical forms of layout patterns
Yao et al. Efficient range pattern matching algorithm for process-hotspot detection
US11861286B2 (en) Segregating defects based on computer-aided design (CAD) identifiers associated with the defects
US11763059B2 (en) Net-based wafer inspection
Kagalwalla et al. Design-aware mask inspection