Charandabi et al., 2012 - Google Patents
Development of a torsional paddle microresonator for mass detectionCharandabi et al., 2012
- Document ID
- 12031155281977720304
- Author
- Charandabi S
- Muhammad H
- Anthony C
- Prewett P
- Publication year
- Publication venue
- 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)
External Links
Snippet
This paper presents the development of a torsional micro paddle resonator (TPM), designed for mass detection purposes. The system is designed to operate using a lorentz force electromagnetic driving system, which allows the implementation of a contactless actuating …
- 238000000105 evaporative light scattering detection 0 title abstract description 11
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties, e.g. capacitance or reluctance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Zhou et al. | Self-excited piezoelectric microcantilever for gas detection | |
| Riesch et al. | A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout | |
| Schmid et al. | Damping mechanisms of single-clamped and prestressed double-clamped resonant polymer microbeams | |
| US6595058B2 (en) | Method and apparatus for determining dynamic response of microstructure by using pulsed broad bandwidth ultrasonic transducer as BAW hammer | |
| US9977097B1 (en) | Micro-scale piezoelectric resonating magnetometer | |
| Zhou et al. | Mitigating thermoelastic dissipation of flexural micromechanical resonators by decoupling resonant frequency from thermal relaxation rate | |
| WO2018105132A1 (en) | Vibration energy harvester using stochastic resonance and vibration energy harvesting system using same | |
| Ma et al. | The role of axial pre-tension in reducing energy dissipation of micro/nano-mechanical resonators | |
| JP2006030195A (en) | Magnetometer having electromechanical resonator | |
| Charandabi et al. | Development of a torsional paddle microresonator for mass detection | |
| Pachkawade | Transduction in M/NEMS-Actuation and Sensing: A Review | |
| Wang et al. | Crystallographic influence on nanomechanics of (100)-oriented silicon resonators | |
| Larcher et al. | Vibrational energy harvesting | |
| JP2011043459A (en) | Mechanical detector and measuring method | |
| Sharma et al. | Dimensional optimization and modelling of a novel double-ended-tuning-fork micro-resonator for high frequency applications | |
| Liang et al. | Design and fabrication of quartz micro-electro-mechanical system-based double-ended tuning fork with variable sections | |
| Qiu et al. | Resonant-mode effect on fluidic damping of piezoelectric microcantilevers vibrating in an infinite viscous gaseous environment | |
| JP2010540266A (en) | Nanoscale or microscale vibratory electromechanical components with improved detection levels | |
| Nastro et al. | Piezoelectric MEMS for sensors, actuators and energy harvesting | |
| Shao et al. | Wide bandwidth lorentz-force magnetometer based on lateral overtone bulk acoustic resonator | |
| De Pasquale et al. | Performances improvement of MEMS sensors and energy scavengers by diamagnetic levitation | |
| Vigevani et al. | Characterization of a single port aluminum nitride tuning fork | |
| Bourouina et al. | Magnetostrictive microactuators and application to two-dimensional optical scanners | |
| Gołębiowski et al. | Modelling of the Silicon Membrane Vibrations Generated by Means of Electromagnetic Forces | |
| WO2022162762A1 (en) | Magnetic sensor |