[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Evans et al., 2014 - Google Patents

Characterizing absolute piezoelectric microelectromechanical system displacement using an atomic force microscope

Evans et al., 2014

Document ID
1208273480024763305
Author
Evans J
Chapman S
Publication year
Publication venue
Journal of Applied Physics

External Links

Snippet

Piezoresponse Force Microscopy (PFM) is a popular tool for the study of ferroelectric and piezoelectric materials at the nanometer level. Progress in the development of piezoelectric MEMS fabrication is highlighting the need to characterize absolute displacement at the …
Continue reading at pubs.aip.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30—Scanning potential microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic means

Similar Documents

Publication Publication Date Title
JP5000076B2 (en) Force scanning probe microscope
Onaran et al. A new atomic force microscope probe with force sensing integrated readout and active tip
US8857248B2 (en) Piezoelectric microcantilevers and uses in atomic force microscopy
US7584653B2 (en) System for wide frequency dynamic nanomechanical analysis
US7441447B2 (en) Methods of imaging in probe microscopy
US9535087B2 (en) Band excitation method applicable to scanning probe microscopy
US6945099B1 (en) Torsional resonance mode probe-based instrument and method
US7979916B2 (en) Preamplifying cantilever and applications thereof
Bosse et al. Physical mechanisms of megahertz vibrations and nonlinear detection in ultrasonic force and related microscopies
JP5813966B2 (en) Displacement detection mechanism and scanning probe microscope using the same
Lepadatu et al. Quantification of electromechanical coupling measured with piezoresponse force microscopy
Hernando et al. Simulation and laser vibrometry characterization of piezoelectric AlN thin films
JP5164743B2 (en) Cantilever, cantilever system, probe microscope and adsorption mass sensor
Duval et al. Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Gotszalk et al. Tip-based nano-manufacturing and-metrology
Mahdavi et al. A high dynamic range AFM probe with collocated piezoelectric transducer pairs
US20080091374A1 (en) Analog High Sensitivity Continuous Phase and Amplitude Detection Device for a Harmonic Microcantilever Sensor
Chao et al. Scanning homodyne interferometer for characterization of piezoelectric films and microelectromechanical systems devices
Evans et al. Characterizing absolute piezoelectric microelectromechanical system displacement using an atomic force microscope
Cumpson et al. Cantilever spring-constant calibration in atomic force microscopy
Vyshatko et al. Fiber-optic based method for the measurements of electric-field induced displacements in ferroelectric materials
JPH06258072A (en) Piezoelectric element thin film evaluating apparatus, interatomic force microscope
JPH09119938A (en) Scanning probe microscope
Oh Prediction of steady state response in dynamic mode atomic force microscopy and its applications in nano-metrology