Zhang et al., 2023 - Google Patents
Experimental and numerical investigation on the uniformity of nanosecond pulsed dielectric barrier discharge influenced by pulse parametersZhang et al., 2023
View PDF- Document ID
- 11966605598741171923
- Author
- Zhang D
- Junxian Y
- Mengyao L
- Jie P
- Feng L
- Zhi F
- Publication year
- Publication venue
- Plasma Science and Technology
External Links
Snippet
Nanosecond (ns) pulsed dielectric barrier discharge (DBD) is considered as a promising method to produce controllable large-volume and high activity low-temperature plasma at atmospheric pressure, which makes it suitable for wide applications. In this work, the ns …
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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