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Che et al., 2018 - Google Patents

Failure mode and mechanism analysis for Cu wire bond on Cu/Low-k chip by wire pull test and finite-element analysis

Che et al., 2018

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Document ID
11824552368202482444
Author
Che F
Wai L
Chai T
Publication year
Publication venue
IEEE Transactions on Device and Materials Reliability

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In this paper, failure mode and mechanism analysis on Cu wire bond and bond pad reliability for Cu/low-k chip are investigated through wire pull test and finite-element analysis (FEA). The wire pull test has been carried out for the bonded Cu wires with changing pull …
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