Tsai et al., 2004 - Google Patents
High-frequency, silicon-based ultrasonic nozzles using multiple Fourier hornsTsai et al., 2004
View PDF- Document ID
- 11570996033955781107
- Author
- Tsai S
- Song Y
- Tseng T
- Chou Y
- Chen B
- Tsai C
- Publication year
- Publication venue
- ieee transactions on ultrasonics, ferroelectrics, and frequency control
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This paper presents the design, simulation, and characterization of microfabricated 0.5 MHz, silicon-based, ultrasonic nozzles. Each nozzle is made of a piezoelectric drive section and a silicon resonator consisting of multiple Fourier horns, each with half wavelength design and …
- 210000003284 Horns 0 title abstract description 54
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