[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Hiromoto et al., 2014 - Google Patents

Room-temperature THz antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna

Hiromoto et al., 2014

Document ID
11032001854879354847
Author
Hiromoto N
Tiwari A
Aoki M
Satoh H
Takeda M
Inokawa H
Publication year
Publication venue
2014 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz)

External Links

Snippet

We have proposed and fabricated an antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna on a Si substrate to achieve a high-performance sensing in 1 THz frequency region at a room-temperature. The heater is directly connected …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/02—Details
    • G01J5/08—Optical features
    • G01J5/0803—Optical elements not provided otherwise, e.g. optical manifolds, gratings, holograms, cubic beamsplitters, prisms, particular coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/10—Radiation pyrometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry using electric radiation detectors using resistors, thermistors, or semi-conductors sensitive to radiation
    • G01J5/22—Electrical features
    • G01J5/24—Use of a specially-adapted circuit, e.g. bridge circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/02—Details
    • G01J5/04—Casings Mountings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/10—Radiation pyrometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/50—Radiation pyrometry using techniques specified in the subgroups below
    • G01J5/52—Radiation pyrometry using techniques specified in the subgroups below using comparison with reference sources, e.g. disappearing-filament pyrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J5/38—Radiation pyrometry using extension or expansion of solids or fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry
    • G01J2005/0077—Imaging
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/09—Devices sensitive to infra-red, visible or ultraviolet radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/06—Measuring quantity of heat conveyed by flowing mediums, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
    • G01K17/08—Measuring quantity of heat conveyed by flowing mediums, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature
    • G01K17/20—Measuring quantity of heat conveyed by flowing mediums, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature across a radiating surface, combined with ascertainment of the heat transmission coefficient
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L35/00—Thermo-electric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermo-electric effects or thermomagnetic effects; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L35/28—Thermo-electric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermo-electric effects or thermomagnetic effects; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof operating with Peltier or Seebeck effect only
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L35/00—Thermo-electric devices comprising a junction of dissimilar materials, i.e. exhibiting Seebeck or Peltier effect with or without other thermo-electric effects or thermomagnetic effects; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L35/12—Selection of the material for the legs of the junction

Similar Documents

Publication Publication Date Title
Lewis A review of terahertz detectors
Hammar et al. Terahertz Direct Detection in ${\hbox {YBa}} _ {2}{\hbox {Cu}} _ {3}{\hbox {O}} _ {7} $ Microbolometers
Huhn et al. Uncooled antenna-coupled terahertz detectors with 22 μs response time based on BiSb/Sb thermocouples
Hiromoto et al. Room-temperature THz antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna
Stewart et al. Nanophotonic engineering: a new paradigm for spectrally sensitive thermal photodetectors
Chen Fully quantitative characterization of CMOS–MEMS polysilicon/titanium thermopile infrared sensors
Sizov et al. Two-color detector: Mercury-cadmium-telluride as a terahertz and infrared detector
Tiwari et al. THz antenna-coupled microbolometer with 0.1-μm-wide titanium thermistor
Aji et al. Input power and effective area in terahertz detector measurement: a review
He et al. Improved thermopile on pyramidally-textured dielectric film
Ihring et al. Surface-micromachined thermoelectric infrared focal-plane array with high detectivity for room temperature operation
Ahmed et al. Characterization of an amorphous ge/sub x/si/sub 1-x/o/sub y/microbolometer for thermal imaging applications
Varpula et al. Uncooled nano-thermoelectric bolometers for infrared imaging and sensing
Kosarev et al. SixGey: H-based micro-bolometers studied in the terahertz frequency range
Chen et al. A vanadium dioxide microbolometer in the transition region for millimeter wave imaging
Varpula et al. High-performance infrared thermoelectric bolometers based on nanomembranes
Varpula et al. Thermoelectric bolometers based on silicon membranes
Ihring et al. High performance uncooled THz sensing structures based on antenna-coupled air-bridges
Chang et al. Optical and thermal properties of ANL/KICP polarization sensitive bolometers for SPTpol
Szentpáli et al. Thermopile antennas for detection of millimeter waves
US20190013455A1 (en) Thermoelectric device
Varpula et al. High-performance silicon-based nano-thermoelectric bolometers for uncooled infrared sensing
Hiromoto et al. Room-temperature terahertz antenna-coupled microbolometers with titanium thermistor and heater
Gupta et al. Design optimization of Pixel Structure for [alpha]-Si based uncooled Infrared detector
Hou et al. An in-situ self-test method for measuring absorptivity of film-type uncooled infrared detectors