Shim et al., 2013 - Google Patents
Electron beam induced local crystallization of HfO 2 nanopores for biosensing applicationsShim et al., 2013
View PDF- Document ID
- 10947703528670734359
- Author
- Shim J
- Rivera J
- Bashir R
- Publication year
- Publication venue
- Nanoscale
External Links
Snippet
We report the development of single, locally crystallized nanopores in HfO2 membranes for biosensing applications. HfO2 is chosen for its isoelectric point of 7.0, mechanical and chemical stability in solution, and for its potential as a high-k material for nanopore ionic field …
- 238000002425 crystallisation 0 title abstract description 20
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
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