Sun et al., 2018 - Google Patents
A new low-cost fabrication method of SU-8 micro–nano channels and needle tip in electro-hydrodynamic jet chipsSun et al., 2018
- Document ID
- 10851490873240059255
- Author
- Sun L
- Liu L
- Qi L
- Zhou J
- Yin Z
- Wu D
- Zou H
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
Electro-hydrodynamic (EHD) jets are widely used for direct writing of micro and nano structures. However, the application of an EHD jet is limited by its high-cost production process. To overcome the drawbacks mentioned above, a new fabrication method of …
- 239000002090 nanochannel 0 title abstract description 46
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