[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Siwak et al., 2015 - Google Patents

Fabrication challenges for indium phosphide microsystems

Siwak et al., 2015

View PDF
Document ID
10737010300501426427
Author
Siwak N
Fan X
Ghodssi R
Publication year
Publication venue
Journal of Micromechanics and Microengineering

External Links

Snippet

From the inception of III–V microsystems, monolithically integrated device designs have been the motivating drive for this field, bringing together the utility of single-chip microsystems and conventional fabrication techniques. Indium phosphide (InP) has a …
Continue reading at umdmsal.com (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/02—Optical fibre with cladding with or without a coating
    • G02B6/02295—Microstructured optical fibre
    • G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes

Similar Documents

Publication Publication Date Title
Siwak et al. Fabrication challenges for indium phosphide microsystems
Xing et al. CMOS-compatible PECVD silicon carbide platform for linear and nonlinear optics
Brun et al. Low loss SiGe graded index waveguides for mid-IR applications
Pernice et al. High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics
Asano et al. Photonic crystal devices in silicon photonics
De La Rue et al. Photonic crystal devices: some basics and selected topics
Younis et al. Towards low-loss waveguides in SOI and Ge-on-SOI for mid-IR sensing
Kim et al. Tunable transmission resonant filter and modulator with vertical gratings
Midolo et al. Electromechanical tuning of vertically-coupled photonic crystal nanobeams
Kelly et al. Monolithic suspended optical waveguides for InP MEMS
Liu et al. Free-standing GaN grating couplers and rib waveguide for planar photonics at telecommunication wavelength
Leclercq et al. InP-based MOEMS and related topics
Wang et al. Polarization-insensitive ultrasmall microring resonator design based on optimized Si sandwich nanowires
Awan Fabrication of III-V integrated photonic devices
Djordjev et al. Study of the effects of the geometry on the performance of vertically coupled InP microdisk resonators
Midolo et al. Nano‐Opto‐Electro‐Mechanical Systems for Integrated Quantum Photonics
Sadasivan Optical MEMS (microspheres and ring resonators): Overview of recent progress
Binfeng et al. Polymer waveguide Bragg grating Fabry–Perot filter using a nanoimprinting technique
Zimmermann et al. Large dispersion in photonic crystal waveguide resonator
Liu et al. Design of free-standing GaN strip waveguide and grating couplers
Sun Novel photonic integrated circuits devices based on AlGaInAs/InP
Burek Free-standing nanomechanical and nanophotonic structures in single-crystal diamond
Zhou et al. Microresonator-enhanced quantum dot single-photon emission in GaAs-on-insulator platform
Reshef Integrated metamaterials and nanophotonics in CMOS-compatible materials
Abbaslou et al. High-spectral-contrast symmetric modes in photonic crystal dual nanobeam resonators