Dhere et al., 1970 - Google Patents
Low TCR Kanthal Resistive Films for Hybrid IC'sDhere et al., 1970
- Document ID
- 1070633337444895854
- Author
- Dhere N
- Sarma G
- Parikh N
- Publication year
- Publication venue
- Journal of Vacuum Science and Technology
External Links
Snippet
Investigations were carried out regarding the feasibility of Kanthal resistive films in hybrid integrated circuits. The technique for deposition was conventional evaporation from a multistrand tungsten filament onto substrates at 325° C, in vacua better than 1× 10− 5 Torr …
- 229910000953 kanthal 0 title abstract description 37
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