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Chen et al., 2020 - Google Patents

Influence of Al content and annealing atmosphere on optoelectronic characteristics of Al: ZnO thin films

Chen et al., 2020

Document ID
10451979257620711735
Author
Chen F
Tsai D
Chang Z
Chen E
Shieu F
Publication year
Publication venue
Applied Physics A

External Links

Snippet

Aluminum-doped zinc oxide (AZO) was cosputtered from ZnO and Al targets on glass substrates at room temperature. The effect of Al-target power and annealing atmosphere on structural and optoelectronic properties of AZO films was investigated.[Al]/[Zn] ratio …
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