[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Geiger et al., 1999 - Google Patents

Modifications to an analytical mass spectrometer for the soft-landing experiment

Geiger et al., 1999

Document ID
10303164307822673683
Author
Geiger R
Melnyk M
Busch K
Bartlett M
Publication year
Publication venue
International journal of mass spectrometry

External Links

Snippet

Modifications to a hybrid geometry beam mass spectrometer are described that allow its use for soft-landing of ions onto a stainless steel surface intercepting the ion beam at the site of the intermediate detector. Initial success is documented through the presence of metal ions …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a micro-scale
    • H01J2237/3174—Etching microareas
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H01J49/0045—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn characterised by the fragmentation or other specific reaction
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes

Similar Documents

Publication Publication Date Title
Brunelle et al. Biological tissue imaging with time‐of‐flight secondary ion mass spectrometry and cluster ion sources
Pisonero et al. Critical revision of GD-MS, LA-ICP-MS and SIMS as inorganic mass spectrometric techniques for direct solid analysis
Iltgen et al. Optimized time-of-flight secondary ion mass spectroscopy depth profiling with a dual beam technique
Pillatsch et al. FIBSIMS: A review of secondary ion mass spectrometry for analytical dual beam focussed ion beam instruments
Vickerman et al. SIMS—A precursor and partner to contemporary mass spectrometry
US11391681B2 (en) Nanoparticulate assisted nanoscale molecular imaging by mass spectrometry
Reniers et al. New improvements in energy and spatial (x, y, z) resolution in AES and XPS applications
Appelhans et al. Focused, rasterable, high-energy neutral molecular beam probe for secondary ion mass spectrometry
Geiger et al. Modifications to an analytical mass spectrometer for the soft-landing experiment
US9721781B2 (en) Device for mass spectrometry
Baker Secondary ion mass spectrometry
Feld et al. Comparative and complementary plasma desorption mass spectrometry/secondary ion mass spectrometry investigations of polymer materials
Skopinski et al. Time-of-flight mass spectrometry of particle emission during irradiation with slow, highly charged ions
Ghumman et al. An upgraded TOF-SIMS VG Ionex IX23LS: Study on the negative secondary ion emission of III–V compound semiconductors with prior neutral cesium deposition
Szmytkowski et al. Spectrometer for the study of electron-assisted processes
Lohmann et al. Ion-induced particle desorption in time-of-flight medium energy ion scattering
Heiland et al. 6. Ion Scattering and Secondary-Ion Mass Spectrometry
Wucher Molecular ionization probability in cluster-SIMS
Hoshi et al. High resolution static SIMS imaging by time of flight SIMS
Maharrey et al. High mass resolution SIMS
Aubriet et al. Laser ablation and static secondary ion mass spectrometry capabilities in the characterization of inorganic materials
Groenewold et al. Characterization of copper chloride cluster ions formed in secondary ion mass spectrometry
Ross et al. Fast-atom molecular secondary-ion mass spectrometry
Bacon et al. Atomic spectrometry update. Atomic mass spectrometry
Ballauf et al. A high sensitivity, high resolution tandem mass spectrometer to research low-energy, reactive ion–surface interactions