Böhme et al., 2008 - Google Patents

Sub-wavelength ripples in fused silica after irradiation of the solid/liquid interface with ultrashort laser pulses

Böhme et al., 2008

Document ID: 10239034603915996811
Author: Böhme R; Vass C; Hopp B; Zimmer K
Publication year: 2008
Publication venue: Nanotechnology

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Laser-induced backside wet etching (LIBWE) is performed using ultrashort 248 nm laser pulses with a pulse duration of 600 fs to obtain sub-wavelength laser-induced periodic surface structures (LIPSS) on the back surface of fused silica which is in contact with a 0.5 …

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VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide 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O=[Si]=O 0 title abstract description 22

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam

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