Erler et al., 2013 - Google Patents
C2. 3-A monolithic integrated MEMS in a 350 nm technology for filter monitoring applicationsErler et al., 2013
View PDF- Document ID
- 10126572084828426593
- Author
- Erler K
- Horstmann J
- Neubert M
- Seidel R
- Pohle A
- Gross C
- Rönisch A
- Gabriel P
- et al.
- Publication year
- Publication venue
- Proceedings SENSOR 2013
External Links
Snippet
This paper presents a system which combines a modern 350 nm mixed-signal CMOS technology with a MEMS technology for monitoring of the filter contamination level of suction and filtering systems. Therefore the system includes a piezoresistive pressure sensor, a …
- 238000005516 engineering process 0 title abstract description 13
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
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