Nuthongkum et al., 2017 - Google Patents
[Bi]:[Te] Control, Structural and Thermoelectric Properties of Flexible Bi x Te y Thin Films Prepared by RF Magnetron Sputtering at Different Sputtering PressuresNuthongkum et al., 2017
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- 10197096078700484190
- Author
- Nuthongkum P
- Sakdanuphab R
- Horprathum M
- Sakulkalavek A
- Publication year
- Publication venue
- Journal of Electronic Materials
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Snippet
In this work, flexible Bi x Te y thin films were prepared by radio frequency (RF) magnetron sputtering using a Bi 2 Te 3 target on polyimide substrate. The effects of sputtering pressures, which ranged between 0.6 Pa and 1.6 Pa on the [Bi]:[Te] ratio, and structural and …
- 239000010409 thin film 0 title abstract description 61
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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