[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Lin et al., 1993 - Google Patents

Microstructures and soft magnetic properties of sputtered FeSiAlRuTi films

Lin et al., 1993

Document ID
9912937804189525628
Author
Lin J
Chen L
Tseng M
Chen C
Publication year
Publication venue
IEEE transactions on magnetics

External Links

Snippet

The soft magnetic properties and microstructure changes in FeSiAlRuTi films due to post annealing treatments were investigated. It was found that the decrease of coercivity and increase of permeability of the films by annealing treatment are correlated to the reduction of …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metal or alloys
    • H01F10/13—Amorphous metallic alloys, e.g. glassy metals
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/24—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates from liquids

Similar Documents

Publication Publication Date Title
US5998048A (en) Article comprising anisotropic Co-Fe-Cr-N soft magnetic thin films
US5780175A (en) Articles comprising magnetically soft thin films and methods for making such articles
Platt et al. Magnetic and structural properties of FeCoB thin films
Jin et al. High frequency properties of Fe–Cr–Ta–N soft magnetic films
Zhang et al. FePt (001) texture development on an Fe–Ta–C magnetic soft underlayer with SiO 2/MgO as an intermediate layer
Choukh Effect of interface on exchange coupling in NiFe/FeMn system
Aboaf et al. Magnetic, transport, and structural properties of iron-platinum thin films
US6123783A (en) Magnetic data-storage targets and methods for preparation
Naganuma et al. Magnetic and electrical properties of iron nitride films containing both amorphous matrices and nanocrystalline grains
Chen et al. Soft-magnetic properties of Fe–Co–B thin films for ultra-high-frequency applications
Ma et al. A study of sputtering process for nanocrystalline FeAlN soft magnetic thin films
Rogers et al. Microstructural investigations of FeN and FeAlN thin films for recording head applications
Lin et al. Microstructures and soft magnetic properties of sputtered FeSiAlRuTi films
Shima et al. Overlayer-induced anisotropic alignment of Nd 2 Fe 14 B nanograins
Choe Effect of film morphology on grain boundary segregation induced magnetic properties in heat treated CoCrPt/Cr films
Naoe et al. Preparation of soft magnetic films of nanocrystalline Fe–Cu–Nb–Si–B alloy by facing targets sputtering
Xi et al. Exchange biasing in sputtered NiFe/PtMn bilayers
US6117282A (en) Method of producing amorphous Co-Tb magnetic recording thin films
Jin et al. Fe-Cr-N soft magnetic thin films
Chen et al. Soft magnetic properties of Co–Fe–Zr–B–Al–O films
Hu et al. High-coercivity CoPt alloy films grown by sputtering
Loch et al. Structure and annealing of NiMn spin valves
Lin et al. Effects of nitrogen content on the microstructure and magnetic properties of FeTaN films
US5534080A (en) Method for producing Mn-Al thin films
Nakagawa et al. Preparation of soft magnetic and thermally stable Fe–Co–Ta: N/Ti multilayered films by sputter deposition