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Chen et al., 2004 - Google Patents

Advances in Si-based nanotechnology and quantum devices

Chen et al., 2004

Document ID
9852051830337931809
Author
Chen P
Deng N
Zhang L
Publication year
Publication venue
Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.

External Links

Snippet

The preparation technologies of nanostructures were reviewed in tins paper, included nanofabrication and self-assembled growth technique. With the down sizing of present silicon IC technology, validity of Moore's law has become seemingly limited, because the …
Continue reading at ieeexplore.ieee.org (other versions)

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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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