Ding et al., 2014 - Google Patents
Tailoring the surface morphology of zinc oxide films for high-performance micromorph solar cellsDing et al., 2014
- Document ID
- 9644205673847445333
- Author
- Ding L
- Fanni L
- Messerschmidt D
- Zabihzadeh S
- Masis M
- Nicolay S
- Ballif C
- Publication year
- Publication venue
- Solar energy materials and solar cells
External Links
Snippet
Self-textured zinc oxide polycrystalline films prepared by metalorganic low-pressure chemical vapor deposition combine excellent transparency, conductivity and light-scattering ability when used as electrodes for high-efficiency thin-film silicon solar cells. However, the …
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc monoxide 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[Zn]=O 0 title abstract description 280
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- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus peculiar to the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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