Brosler et al., 2023 - Google Patents
Electroconductive silicon nitride-titanium nitride ceramic substrates for CVD diamond electrode depositionBrosler et al., 2023
View HTML- Document ID
- 9581645279816686952
- Author
- Brosler P
- Silva R
- Tedim J
- Oliveira F
- Publication year
- Publication venue
- Ceramics International
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Snippet
The present investigation was carried out to develop dense ceramics of silicon nitride- titanium nitride (Si 3 N 4–TiN) with low electrical resistivity and excellent mechanical properties. The objective was to employ these ceramics as substrates of conductive …
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