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Brosler et al., 2023 - Google Patents

Electroconductive silicon nitride-titanium nitride ceramic substrates for CVD diamond electrode deposition

Brosler et al., 2023

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Document ID
9581645279816686952
Author
Brosler P
Silva R
Tedim J
Oliveira F
Publication year
Publication venue
Ceramics International

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Snippet

The present investigation was carried out to develop dense ceramics of silicon nitride- titanium nitride (Si 3 N 4–TiN) with low electrical resistivity and excellent mechanical properties. The objective was to employ these ceramics as substrates of conductive …
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