[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

M'Closkey et al., 2004 - Google Patents

Modeling, identification, and control of micro-sensor prototypes

M'Closkey et al., 2004

Document ID
9367888760616247481
Author
M'Closkey R
Challoner A
Publication year
Publication venue
Proceedings of the 2004 American Control Conference

External Links

Snippet

Microelectromechanical systems (MEMS) are stimulating the move of modern digital control" on-chip" for a growing number of sophisticated applications. One such application is microinertial sensors of ever increasing capability bringing inertial awareness to virtually …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in preceding groups
    • G01C21/10—Navigation; Navigational instruments not provided for in preceding groups by using measurements of speed or acceleration
    • G01C21/12—Navigation; Navigational instruments not provided for in preceding groups by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
    • G01C21/16—Navigation; Navigational instruments not provided for in preceding groups by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5635—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating wires or strings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • G01C19/728—Assemblies for measuring along different axes, e.g. triads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/02—Rotary gyroscopes

Similar Documents

Publication Publication Date Title
Painter et al. Active structural error suppression in MEMS vibratory rate integrating gyroscopes
Chen et al. A control and signal processing integrated circuit for the JPL-Boeing micromachined gyroscopes
Fang et al. Attitude sensing and dynamic decoupling based on active magnetic bearing of MSDGCMG
US6915215B2 (en) Integrated low power digital gyro control electronics
US7549334B2 (en) Small angle bias measurement mechanism for MEMS instruments
Park Adaptive control strategies for MEMS gyroscopes
Han et al. Micromachined electrostatically suspended gyroscope with a spinning ring-shaped rotor
Jia et al. In-run scale factor compensation for MEMS gyroscope without calibration and fitting
Zheng et al. Control and rotation rate estimation of vibrational MEMS gyroscopes
Hopkins et al. The Silicon Oscillating Accelerometer
M’Closkey et al. System identification of a MEMS gyroscope
Zhou et al. Design of force-to-rebalanced system with adaptive fuzzy-PID controller for N= 3 MEMS disk gyroscope
M'Closkey et al. Modeling, identification, and control of micro-sensor prototypes
Jagannathan et al. Adaptive force-balancing control of MEMS gyroscope with actuator limits
Gaber et al. A hardware implementation of flexible attitude determination and control system for two-axis-stabilized cubesat
CN111006665B (en) Atomic spin gyroscope strapdown system based on magnetic field feedback
Ge et al. Simultaneous angular rate estimates extracted from a single axisymmetric resonator
Challoner Robert M’Closkey* Associate Professor Mech. & Aero. Engineering University of California, LA
Haessig et al. Modern control methods applied to a line-of-sight stabilization and tracking system
M'Closkey et al. Modal parameter identification of a MEMS gyroscope
Sushchenko et al. Improvement of Inertial Sensors for Using in Stabilization Systems
Sung et al. A novel control loop design and its application to the force balance of vibratory rate sensor
Yi et al. A Novel Self-modulation Method for Whole Angle Resonator Gyroscope Based on High Harmonic Compensation
Panferov et al. Checking the Required Accuracy of Measuring the State of Elastic Aerospace Vehicle Structure
US5331401A (en) Method and apparatus for controlling dither in a multiple gyro system