Liu et al., 2021 - Google Patents
Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environmentsLiu et al., 2021
- Document ID
- 9330877148393863432
- Author
- Liu H
- Mao X
- Jiang S
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
NiCrAlY thin films are employed as buffer layers for high temperature thin film sensors, and thermally grown alumina (TG Al 2 O 3) scales are formed by vacuum segregation and oxidation of Al processes at high temperature, which could synergistically enhance the …
- 239000010409 thin film 0 title abstract description 63
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
- C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material
- G01N27/04—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Liu et al. | Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environments | |
| Chen et al. | Fabrication and calibration of Pt–10% Rh/Pt thin film thermocouples | |
| Liu et al. | YSZ/Al2O3 multilayered film as insulating layer for high temperature thin film strain gauge prepared on Ni-based superalloy | |
| CN107267944B (en) | High-temperature film half-bridge resistance strain gauge with temperature self-compensation function and preparation method thereof | |
| Liu et al. | High temperature electrical insulation and adhesion of nanocrystalline YSZ/Al2O3 composite film for thin-film thermocouples on Ni-based superalloy substrates | |
| Liu et al. | Influence of substrate temperature on the microstructure of YSZ films and their application as the insulating layer of thin film sensors for harsh temperature environments | |
| Liu et al. | Preparation and thermal volatility characteristics of In2O3/ITO thin film thermocouple by RF magnetron sputtering | |
| Gregory et al. | Preparation and characterization of ceramic thin film thermocouples | |
| Hu et al. | Multiple cyclic ablation behaviors of multilayer ZrC-TaC coating with ZrC-SiC interface layer | |
| Akoshima et al. | Thermal diffusivity measurement for thermal spray coating attached to substrate using laser flash method | |
| Zhang et al. | Thermoelectricity and antivibration properties of screen-printed nanodoped In1. 35ZnO2. 11/In2O3 thin-film thermocouples on alumina substrates | |
| Liu et al. | High temperature protection performance of sandwich structure Al2O3/Si3N4/YAlO multilayer films for Pt–Pt10% Rh thin film thermocouples | |
| Zhao et al. | Alumina composite coatings with enhanced high-temperature electrical insulating properties on Ni-based superalloy substrates | |
| Jin et al. | High temperature failure modes of In2O3 thin films and improved thermal stability using Al2O3/ZrO2 protective layers | |
| Liu et al. | Influence of a heterolayered Al2O3–ZrO2/Al2O3 ceramic protective overcoat on the high temperature performance of PdCr thin film strain gauges | |
| Tian et al. | Effect of film deposition rate on the thermoelectric output of tungsten-rhenium thin film thermocouples by DC magnetron sputtering | |
| Zhao et al. | Preparation and thermoelectric characteristics of ITO/Pt thin film thermocouples on Ni-based superalloy substrate | |
| Pan et al. | Thermal insulation performance and thermal shock resistance of plasma-sprayed TiAlCrY/Gd2Zr2O7 thermal barrier coating on γ-TiAl alloy | |
| Shi et al. | Effect of SiO2 buffer layer on thermoelectric response of In2O3/ITO thin film thermocouples | |
| Li et al. | Effect of AlN/Al 2 O 3 Thin-Film Protective Layer on the High-Temperature Performance of ITO Thin-Film Strain Gauge | |
| Zhao et al. | Fabrication and microstructure evolution of Al2O3/ZrBN-SiCN/Al2O3 high-temperature oxidation-resistant composite coating | |
| Zhang et al. | Simulation, fabrication, and characteristics of high-temperature, quick-response tungsten–rhenium thin-film thermocouples probe sensor | |
| Wang et al. | In-Situ Integration of High-Temperature Thin-Film Sensor for Precise Measurement of Heat Flux and Temperature on Superalloy Substrate | |
| Wang et al. | Thermally matched multilayer ceramic composite insulating layers for high-temperature thick/thin-film sensors on nickel-based superalloy | |
| CN113755793B (en) | Anti-oxidation self-repairing protective layer for thin film sensor and preparation method thereof |