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Cho et al., 2016 - Google Patents

Highly conductive air-stable ZnO thin film formation under in situ UV illumination for an indium-free transparent electrode

Cho et al., 2016

Document ID
9138977412958341939
Author
Cho B
Kim H
Yang D
Shrestha N
Sung M
Publication year
Publication venue
Rsc Advances

External Links

Snippet

Zinc oxide (ZnO) is considered as the strongest alternative to tin doped indium oxide (ITO)–a commonly used, but an expensive state-of-the-art material for transparent conducting electrodes. This work reports the low temperature atomic layer deposition (ALD) of a highly …
Continue reading at pubs.rsc.org (other versions)

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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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