Istomin et al., 2006 - Google Patents
Plasma asymmetric dipole antenna excited by a surface waveIstomin et al., 2006
- Document ID
- 905890592519743016
- Author
- Istomin E
- Karfidov D
- Minaev I
- Rukhadze A
- Tarakanov V
- Sergeichev K
- Trefilov A
- Publication year
- Publication venue
- Plasma physics reports
External Links
Snippet
A study is made of a quarter-wave asymmetric dipole antenna in which the conducting rod is replaced by a plasma column with an electron density much higher than the critical density. The parameters of such an antenna are determined by the exited surface wave, which …
- 210000002381 Plasma 0 title abstract description 173
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
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