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Jackson et al., 2003 - Google Patents

Integrated bulk/SOI APD sensor: Bulk substrate inspection with Geiger-mode avalanche photodiodes

Jackson et al., 2003

Document ID
9033242613073057188
Author
Jackson J
Donnelly J
O'neill B
Kelleher A
Healy G
Morrison A
Mathewson A
Publication year
Publication venue
Electronics letters

External Links

Snippet

A rapid assessment of bulk silicon quality after removal of the silicon-on-insulator (SOI) and buried oxide layer using both plasma and wet etch is compared with standard p-epi silicon by comparing the performance of avalanche photodiodes (APD) operated in Geiger-mode …
Continue reading at digital-library.theiet.org (other versions)

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