Butkutė et al., 2021 - Google Patents
Optimization of selective laser etching (SLE) for glass micromechanical structure fabricationButkutė et al., 2021
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- 8940653960817695429
- Author
- Butkutė A
- Baravykas T
- Stančikas J
- Tičkūnas T
- Vargalis R
- Paipulas D
- Sirutkaitis V
- Jonušauskas L
- Publication year
- Publication venue
- Optics express
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In this work, we show how femtosecond (fs) laser-based selective glass etching (SLE) can be used to expand capabilities in fabricating 3D structures out of a single piece of glass. First, an investigation of the etching process is performed, taking into account various laser …
- 239000011521 glass 0 title abstract description 70
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