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Kang et al., 2002 - Google Patents

Memory Retention Charateristics of MFMIS Structure Using SBT and Al 2 O 3 Buffer Layer

Kang et al., 2002

Document ID
891367210330665282
Author
Kang S
Ishiwara H
Publication year
Publication venue
Ferroelectrics

External Links

Snippet

For FeRAM (Ferroelectric Random Access Memory) applications, good data retention characteristics and superior reliability will be greatly required. In order to fabricate MFMIS (Metal-Ferroelectrics-Metal-Insulator-Si) structure diodes which are capable of changing …
Continue reading at www.tandfonline.com (other versions)

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    • H01L29/40—Electrodes; Multistep manufacturing processes therefor
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    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/51—Insulating materials associated therewith
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    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
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    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/6684—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a ferroelectric gate insulator
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