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Yamaguchi et al., 2004 - Google Patents

Band diagram and carrier conduction mechanisms in ZrO/sub 2/MIS structures

Yamaguchi et al., 2004

Document ID
8813341858613954566
Author
Yamaguchi T
Satake H
Fukushima N
Publication year
Publication venue
IEEE Transactions on Electron Devices

External Links

Snippet

Energy-band diagrams and carrier-conduction mechanisms in ZrO/sub 2/dielectrics were investigated by using X-ray photoemission spectroscopy and carrier separation measurements for ZrO/sub 2//Zr-silicate/Si structures. It was found that the carrier conduction …
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