Wang et al., 2011 - Google Patents
Oxidation Behaviour of Ti2 AlN Films Composed Mainly of Nanolaminated MAX PhaseWang et al., 2011
- Document ID
- 8692313448664475895
- Author
- Wang Q
- Garkas W
- Renteria A
- Leyens C
- Kim K
- Publication year
- Publication venue
- Journal of Nanoscience and Nanotechnology
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Snippet
In this paper, we reported the oxidation behaviour of Ti2AlN films on polycrystalline Al2O3 substrates. The Ti2AlN films composed mainly of nanolaminated MAX phase was obtained by first depositing Ti–Al–N films using reactive sputtering of two elemental Ti and Al targets …
- 229910017083 AlN 0 title abstract description 93
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