Deng et al., 2023 - Google Patents
Multi-angle Scheimpflug projection 3D microscope: Design, calibration, and three-dimensional reconstructionDeng et al., 2023
- Document ID
- 8593293377929364127
- Author
- Deng H
- Liu Y
- Zhang G
- Qu X
- Ge L
- Yang S
- Publication year
- Publication venue
- Measurement
External Links
Snippet
Abstract 3D measurement of complex micro-structures has becoming increasingly important for precision manufacturing. In this paper, a multi-angle Scheimpflug projection 3D microscope (MASP-3DM) is proposed, and the detailed design procedure is given. The …
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical means
- G01B11/24—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical means
- G01B11/26—Measuring arrangements characterised by the use of optical means for measuring angles or tapers; for testing the alignment of axes
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