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Dubov et al., 2013 - Google Patents

Superhydrophobic silica surfaces: fabrication and stability

Dubov et al., 2013

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Document ID
8579196363619818913
Author
Dubov A
Perez-Toralla K
Letailleur A
Barthel E
Teisseire J
Publication year
Publication venue
Journal of Micromechanics and Microengineering

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We report a simple method to make hybrid or pure silica micropatterns at the surface of a substrate based on the combination of sol–gel process and nano-imprint lithography. The silica patterns can be easily designed during the photolithographic step and functionalized …
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