Yamamura et al., 1989 - Google Patents
Computer studies of ionized cluster beam depositionYamamura et al., 1989
- Document ID
- 8424283794443666481
- Author
- Yamamura Y
- Yamada I
- Takagi T
- Publication year
- Publication venue
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
External Links
Snippet
Using the time-evolution computer simulation code DYACOCT, the early stage of thin-film growth by an ionized cluster beam (more than 100 atoms) is investigated. In the DYACOCT program which is based on the binary collision approximation (BCA), trajectories of ions and …
- 125000004429 atoms 0 abstract description 86
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