Bach, 1970 - Google Patents
Application of ion sputtering in preparing glasses and their surface layers for electron microscope investigationsBach, 1970
- Document ID
- 833427381472531462
- Author
- Bach H
- Publication year
- Publication venue
- Journal of Non-Crystalline Solids
External Links
Snippet
The application of a sputtering apparatus suitable for etching as well as for thinning with an ion beam is described. Glasses and glass-ceramics can be etched residue-free by ion sputtering. Inhomogeneities in their structure such as segregations and devitrifications are …
- 150000002500 ions 0 title abstract description 103
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