Umezu - Google Patents
Kobayashi et a].(45) Date of Patent: Sep. 4, 2012Umezu
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- 8175877930824014735
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- Umezu T
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An object is to provide a method capable of boring a borehole (65) Prior Publication Data even When quartz glass or silicon dioxide is deposited as molten dross by laser irradiation. A laser irradiation position Us 2010/0001 179 A1 Jan'7'2010 of a workpiece is irradiated …
- 239000007788 liquid 0 abstract description 78
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