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Ohashi et al., 2021 - Google Patents

Nanometer-order contouring control in a feed drive system using linear ball guides by applying a combination of modified disturbance observer and repetitive control

Ohashi et al., 2021

Document ID
7793274226044136016
Author
Ohashi T
Shibata H
Futami S
Sato R
Publication year
Publication venue
Nanomanufacturing and Metrology

External Links

Snippet

This paper proposes a quadrant glitch compensation method to achieve nanometer-level accuracy of contouring control for a feed drive system using linear ball guides. The proposed method is a combination of a modified disturbance observer (“disturbance suppressor”) and …
Continue reading at link.springer.com (other versions)

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors

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