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Shu et al., 2005 - Google Patents

Design and test of a differential scanning stage system for a x-ray nanoprobe instrument

Shu et al., 2005

Document ID
6992804278079716224
Author
Shu D
Maser J
Holt M
Lai B
Vogt S
Wang Y
Preissner C
Han Y
Tieman B
Winarski R
Smolyanitskiy A
Stephenson G
Publication year
Publication venue
Optomechanics 2005

External Links

Snippet

We have developed a prototype instrument with a novel interferometrically controlled differential scanning stage system. The system consists of 9 DC-motor-driven stages, 4 picomotor-driven stages, and 2 PZT-driven stages. A custom-built laser Doppler …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionizing radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionizing radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

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