Singh et al., 2012 - Google Patents
Nanomaterials and nanopatterns based on laser processing: a brief review on current state of artSingh et al., 2012
- Document ID
- 6848385924837781553
- Author
- Singh S
- Zeng H
- Publication year
- Publication venue
- Science of Advanced Materials
External Links
Snippet
Lasers have shown their appreciable engagements in the synthesis, post processing and characterization of nano-scale materials since its discovery in 1960. Laser ablation in the gaseous media have been widely explored for the fabrication of thin films, nanoparticles and …
- 239000002086 nanomaterial 0 title abstract description 94
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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