[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Ferreira et al., 2014 - Google Patents

Integration of a silicon-based microprobe into a gear measuring instrument for accurate measurement of micro gears

Ferreira et al., 2014

Document ID
6777008468354689585
Author
Ferreira N
Krah T
Jeong D
Metz D
Kniel K
Dietzel A
Büttgenbach S
Härtig F
Publication year
Publication venue
Measurement Science and Technology

External Links

Snippet

The integration of silicon micro probing systems into conventional gear measuring instruments (GMIs) allows fully automated measurements of external involute micro spur gears of normal modules smaller than 1 mm. This system, based on a silicon microprobe …
Continue reading at iopscience.iop.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups
    • G01B21/02—Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the preceding groups for measuring length, width, or thickness by measuring coordinates of points
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Instruments as specified in the subgroups and characterised by the use of mechanical measuring means
    • G01B3/20—Slide gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Instruments as specified in the subgroups and characterised by the use of mechanical measuring means
    • G01B3/002—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical means
    • G01B5/004—Measuring arrangements characterised by the use of mechanical means for measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES

Similar Documents

Publication Publication Date Title
Ferreira et al. Integration of a silicon-based microprobe into a gear measuring instrument for accurate measurement of micro gears
Mutilba et al. Traceability of on-machine tool measurement: a review
CN102589430B (en) Calibrating method for multi-instrument coordinate unification device
Yandayan et al. High precision small angle generator for realization of the SI unit of plane angle and calibration of high precision autocollimators
Kumar et al. The development and characterization of a square ring shaped force transducer
Hack et al. A reference material for establishing uncertainties in full-field displacement measurements
CN101369199A (en) Method for correcting coordinate on contact panel to real display coordinate
JP2009008523A (en) Method of calibrating parameters for multi-joint type coordinate measuring apparatus
Li et al. An analogue contact probe using a compact 3D optical sensor for micro/nano coordinate measuring machines
Leach et al. Advances in engineering nanometrology at the National Physical Laboratory
CN102879032A (en) Dynamic measuring device for angle measurement precision
Dai et al. Overview of 3D micro-and nanocoordinate metrology at PTB
Cuesta et al. A new concept of feature-based gauge for coordinate measuring arm evaluation
Murakami et al. Development of measurement system for microstructures using an optical fiber probe: Improvement of measurable region and depth
Sun et al. A high-accuracy roundness measurement for cylindrical components by a morphological filter considering eccentricity, probe offset, tip head radius and tilt error
Cheng et al. Uncertainty evaluation for dynamic identification of a micro contact probe based on the signal transmission chain analysis method
CN102506688A (en) Resistance strain thickness measuring device and measurement method thereof
Dalola et al. Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout
Ling et al. Effect on the measurement for gear involute profile caused by the error of probe position
Küng et al. Application of a virtual coordinate measuring machine for measurement uncertainty estimation of aspherical lens parameters
CN104748716B (en) The method for observing the change of three dimensional strain tensor
CN107024401B (en) Obtain the method and system of metal material anisotropy and tension and compression asymmetry
Lee et al. A technique for accuracy improvement of squareness estimation using a double ball-bar
Lee et al. Probing-error compensation using 5 degree of freedom force/moment sensor for coordinate measuring machine
Zhao et al. High-precision radius and sphericity measurement for microspheres of micro-CMM probe tip