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Lei et al., 2021 - Google Patents

The Fabrication of Three-layer Silicon Stacked Antenna

Lei et al., 2021

Document ID
6474144169734582617
Author
Lei C
Jian Z
Fang H
Lei J
Min H
Publication year
Publication venue
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

External Links

Snippet

In this paper, a three-layer stacked structure patch antenna operating at W-band based on Three-Dimensional Silicon Integration Technology is proposed, designed and measured. The antenna is an 8* 8 patch array antenna, made of three layers of high resistance silicon …
Continue reading at ieeexplore.ieee.org (other versions)

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