[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Ghafur et al., 2009 - Google Patents

A velocity map imaging detector with an integrated gas injection system

Ghafur et al., 2009

View PDF
Document ID
6225356128536172471
Author
Ghafur O
Siu W
Johnsson P
Kling M
Drescher M
Vrakking M
Publication year
Publication venue
Review of Scientific Instruments

External Links

Snippet

We present the design of a velocity map imaging spectrometer where the target gas is injected from a capillary that is integrated in the repeller plate of the ion optics assembly that drives electrons/ions formed by ionization or dissociation to a two-dimensional detector. The …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a micro-scale
    • H01J2237/3174—Etching microareas
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Similar Documents

Publication Publication Date Title
Ghafur et al. A velocity map imaging detector with an integrated gas injection system
Fehre et al. Absolute ion detection efficiencies of microchannel plates and funnel microchannel plates for multi-coincidence detection
O’keeffe et al. A photoelectron velocity map imaging spectrometer for experiments combining synchrotron and laser radiations
Li et al. Megapixel ion imaging with standard video
Krems et al. Channel electron multiplier and channelplate efficiencies for detecting positive ions
Knuffman et al. Cold atomic beam ion source for focused ion beam applications
Horke et al. Velocity-map imaging at low extraction fields
Tang et al. A threshold photoelectron-photoion coincidence spectrometer with double velocity imaging using synchrotron radiation
Vredenborg et al. A photoelectron-photoion coincidence imaging apparatus for femtosecond time-resolved molecular dynamics with electron time-of-flight resolution of σ= 18ps and energy resolution ΔE∕ E= 3.5%
Wu et al. Positive/negative ion velocity mapping apparatus for electron-molecule reactions
Kothe et al. Time-of-flight electron spectrometer for a broad range of kinetic energies
Moradmand et al. Momentum-imaging apparatus for the study of dissociative electron attachment dynamics
Li et al. A co-axial velocity map imaging spectrometer for electrons
Rajeev et al. A Thomson parabola ion imaging spectrometer designed to probe relativistic intensity ionization dynamics of nanoclusters
Long et al. Ion-ion coincidence imaging at high event rate using an in-vacuum pixel detector
Tyunkov et al. Generation of metal ions in the beam plasma produced by a forevacuum-pressure electron beam source
Laksman et al. Development and characterization of a multiple-coincidence ion-momentum imaging spectrometer
Meng et al. Measurement of the density profile of pure and seeded molecular beams by femtosecond ion imaging
Matsuda et al. A magnetic-bottle multi-electron-ion coincidence spectrometer
Diehl et al. Ion optical design of a collinear laser-negative ion beam apparatus
Skopinski et al. Time-of-flight mass spectrometry of particle emission during irradiation with slow, highly charged ions
Okutsu et al. Development of a linear-type double reflectron for focused imaging of photofragment ions from mass-selected complex ions
Bastian et al. A new endstation for extreme-ultraviolet spectroscopy of free clusters and nanodroplets
Eller et al. SIMS instrumentation and methodology for mapping of co-localized molecules
Chakraborty et al. A new time of flight mass spectrometer for absolute dissociative electron attachment cross-section measurements in gas phase