Malouf et al., 1995 - Google Patents

Classifications

• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J25/00—Transit-time tubes, e.g. Klystrons, travelling-wave tubes, magnetrons
  • H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
  • H01J25/36—Tubes in which an electron stream interacts with a wave travelling along a delay line or equivalent sequence of impedance elements, and without magnet system producing an H-field crossing the E-field
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
  • H01J23/16—Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
  • H01J23/18—Resonators
  • H01J23/20—Cavity resonators; Adjustment or tuning thereof
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J25/00—Transit-time tubes, e.g. Klystrons, travelling-wave tubes, magnetrons
  • H01J25/34—Travelling-wave tubes; Tubes in which a travelling wave is simulated at spaced gaps
  • H01J25/42—Tubes in which an electron stream interacts with a wave travelling along a delay line or equivalent sequence of impedance elements, and with a magnet system producing an H-field crossing the E-field
  • H01J25/44—Tubes in which an electron stream interacts with a wave travelling along a delay line or equivalent sequence of impedance elements, and with a magnet system producing an H-field crossing the E-field the forward travelling wave being utilised
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
  • H01J23/02—Electrodes; Magnetic control means; Screens
  • H01J23/08—Focusing arrangements, e.g. for concentrating stream of electrons, for preventing spreading of stream
  • H01J23/087—Magnetic focusing arrangements
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J25/00—Transit-time tubes, e.g. Klystrons, travelling-wave tubes, magnetrons
  • H01J25/02—Tubes with electron stream modulated in velocity or density in a modulator zone and thereafter giving up energy in an inducing zone, the zones being associated with one or more resonators
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
  • H01J23/02—Electrodes; Magnetic control means; Screens
  • H01J23/10—Magnet systems for directing or deflecting the discharge along a desired path, e.g. a spiral path
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J25/00—Transit-time tubes, e.g. Klystrons, travelling-wave tubes, magnetrons
  • H01J25/50—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J27/00—Ion beam tubes
  • H01J27/02—Ion sources; Ion guns
  • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
• • H—ELECTRICITY
  • H03—BASIC ELECTRONIC CIRCUITRY
  • H03F—AMPLIFIERS
  • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
  • H03F3/54—Amplifiers using transit-time effect in tubes or semiconductor devices
  • H03F3/56—Amplifiers using transit-time effect in tubes or semiconductor devices using klystrons
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
  • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
  • H05H7/14—Vacuum chambers
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
  • H01P7/00—Resonators of the waveguide type

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