Park et al., 2002 - Google Patents
Development of electrochemical micro machining for air-lubricated hydrodynamic bearingsPark et al., 2002
View PDF- Document ID
- 6001296632976560823
- Author
- Park J
- Lee E
- Won C
- Moon Y
- Publication year
- Publication venue
- Microsystem Technologies
External Links
Snippet
A specially-built EMM (Electrochemical Micro Machining)/PECM (Pulse Electrochemical Machining) cell, a electrode tool filled with non-conducting material, a electrolyte flow control system and a small & stable gap control unit are developed to achieve accurate dimensions …
- 238000005459 micromachining 0 title abstract description 9
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