Nalepka et al., 2014 - Google Patents
Laser-deposited Cu/α–Al 2 O 3 nanocomposite: experiment and modelingNalepka et al., 2014
View HTML- Document ID
- 5774438198512991260
- Author
- Nalepka K
- Hoffman J
- Kret S
- Nalepka P
- Szymanski Z
- Publication year
- Publication venue
- Applied Physics A
External Links
Snippet
A Nd: YAG laser operating at a wavelength of 266 or 355 nm is used to deposit a thin layer of copper on the (0 0 0 1) α-Al 2 O 3 surface. The formation process is precisely controlled by identification of time distribution of two characteristics: energy and flux density of particles …
- 229910018072 Al 2 O 3 0 title abstract description 22
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a micro-scale
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