Stevens et al., 2000 - Google Patents
Improved fabrication approach for carbon nanotube probe devicesStevens et al., 2000
View PDF- Document ID
- 5701780993702942328
- Author
- Stevens R
- Nguyen C
- Cassell A
- Delzeit L
- Meyyappan M
- Han J
- Publication year
- Publication venue
- Applied Physics Letters
External Links
Snippet
An improved process is developed for simple and efficient fabrication of carbon nanotube probe devices. This process requires only two steps to make nanotube probes. First a nanotube cartridge is created using chemical vapor deposition, then the nanotubes are …
- 239000000523 sample 0 title abstract description 43
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
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