Matsumoto et al., 2018 - Google Patents
MOCVD growth of nitride semiconductorsMatsumoto et al., 2018
- Document ID
- 567101560418148738
- Author
- Matsumoto K
- Yano Y
- Tokunaga H
- Ubukata A
- Piao G
- Mishima A
- Ikenaga T
- Tomita Y
- Tabuchi T
- Publication year
- Publication venue
- Nitride Semiconductor Light-Emitting Diodes (LEDs)
External Links
Snippet
In this chapter, specific characteristics of nitride semiconductor metal organic chemical vapor deposition are described about the following topics: growth mechanisms, Mg doping, visible multi quantum wellMQW growth, and ultraviolet materials growth by using high flow speed …
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