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Suzuki et al., 2000 - Google Patents

Energy saving in semiconductor fabs by out-air handling unit performance improvement

Suzuki et al., 2000

Document ID
5270132581746340532
Author
Suzuki H
Hanaoka H
Ohkubo Y
Yamazaki Y
Shirai Y
Ohmi T
Publication year
Publication venue
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No. 00CH37130)

External Links

Snippet

We shows methods of energy saving. The energy consumed in semiconductor fabs is classified into two categories, the manufacturing system and the air conditioning. The energy for the air conditioning is further classified into fresh air intake, recirculation (clean room) air …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F1/00Tubular elements; Assemblies of tubular elements
    • F28F1/10Tubular lements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BINDEXING SCHEME RELATING TO CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. INCLUDING HOUSING AND APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/50Systems profiting of external/internal conditions
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
    • F24F5/00Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat; combined with household units such as an oven or water heater
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
    • F24F12/00Use of energy recovery systems in air conditioning, ventilation or screening
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00Control or safety systems or apparatus
    • F24F11/0009Electrical control or safety systems or apparatus
    • F24F11/001Control systems or circuits characterised by their inputs, e.g. using sensors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
    • F24F1/00Rooms units, e.g. receiving primary air from a central station or with supply of heating or cooling agents from a central station, such as those applied to air-treatment systems included in F24F3/00 and F24F5/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/22Means for preventing condensation or evacuating condensate
    • F24F13/222Means for preventing condensation or evacuating condensate for evacuating condensate

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