Suzuki et al., 2000 - Google Patents
Energy saving in semiconductor fabs by out-air handling unit performance improvementSuzuki et al., 2000
- Document ID
- 5270132581746340532
- Author
- Suzuki H
- Hanaoka H
- Ohkubo Y
- Yamazaki Y
- Shirai Y
- Ohmi T
- Publication year
- Publication venue
- Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No. 00CH37130)
External Links
Snippet
We shows methods of energy saving. The energy consumed in semiconductor fabs is classified into two categories, the manufacturing system and the air conditioning. The energy for the air conditioning is further classified into fresh air intake, recirculation (clean room) air …
- 239000004065 semiconductor 0 title abstract description 7
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F1/00—Tubular elements; Assemblies of tubular elements
- F28F1/10—Tubular lements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—INDEXING SCHEME RELATING TO CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. INCLUDING HOUSING AND APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/50—Systems profiting of external/internal conditions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
- F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat; combined with household units such as an oven or water heater
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
- F24F12/00—Use of energy recovery systems in air conditioning, ventilation or screening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety systems or apparatus
- F24F11/0009—Electrical control or safety systems or apparatus
- F24F11/001—Control systems or circuits characterised by their inputs, e.g. using sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
- F24F1/00—Rooms units, e.g. receiving primary air from a central station or with supply of heating or cooling agents from a central station, such as those applied to air-treatment systems included in F24F3/00 and F24F5/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/22—Means for preventing condensation or evacuating condensate
- F24F13/222—Means for preventing condensation or evacuating condensate for evacuating condensate
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